Invention Grant
- Patent Title: Methods of forming image sensors including deposited negative fixed charge layers on photoelectric conversion regions
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Application No.: US14605243Application Date: 2015-01-26
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Publication No.: US09741758B2Publication Date: 2017-08-22
- Inventor: Hyungjoon Kim , Hyoungsun Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2014-0048774 20140423
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
A method of forming an image sensor can be provided by forming a respective photoelectric conversion region in each of a plurality of unit pixel regions of a substrate and depositing a material configured to provide a negative fixed charge layer on the photoelectric conversion region.
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