Invention Grant
- Patent Title: Acoustic sensor
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Application No.: US15011655Application Date: 2016-01-31
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Publication No.: US09743195B2Publication Date: 2017-08-22
- Inventor: Akihiro Okugawa , Takashi Kasai , Koji Momotani
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Jianq Chyun IP Office
- Priority: JP2015-018774 20150202
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R19/04 ; H04R31/00

Abstract:
An acoustic sensor adapted to convert acoustic vibration to a change in an electrostatic capacitance to detect the acoustic vibration is provided. The acoustic sensor includes a semiconductor substrate, a back plate including a fixed plate arranged to face a surface of the semiconductor substrate, and a fixed electrode film arranged on the fixed plate, and a vibrating electrode film arranged to face the back plate with a space formed therebetween. The vibrating electrode film includes a plate-like vibrating member that vibrates in response to sound pressure. The vibrating electrode film is fixed to the back plate with a fixing unit thereof including one or more fixing portions each including a fixing protruding end that is arranged on a protruding end of a leg portion protruding from an edge of the vibrating member. The vibrating member has an edge portion surrounding at least a part of the fixing protruding end.
Public/Granted literature
- US20160227330A1 ACOUSTIC SENSOR Public/Granted day:2016-08-04
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