- 专利标题: Individually switched field emission arrays
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申请号: US14765759申请日: 2014-02-05
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公开(公告)号: US09748071B2公开(公告)日: 2017-08-29
- 发明人: Stephen Angelo Guerrera , Akintunde I. Akinwande
- 申请人: Massachusetts Institute of Technology
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理机构: Wolf, Greenfield & Sacks, P.C.
- 国际申请: PCT/US2014/014926 WO 20140205
- 国际公布: WO2014/124041 WO 20140814
- 主分类号: H01J37/073
- IPC分类号: H01J37/073 ; H01L21/00 ; H01J37/065 ; H01J37/317 ; H01J37/30
摘要:
An electron beam apparatus is disclosed that includes a plurality of current source elements disposed in at least one field emitter array. Each current source element can be a gated vertical transistor, an ungated vertical transistor, or a current controlled channel that is proximate to an optically-modulated current source. The electron beam apparatus includes a plurality of field emitter tips, each field emitter tip of the plurality of field emitter tips being coupled to a current source element of the plurality of current source elements. The electron beam apparatus is configured to allow selective activation of one or more of the current source elements.
公开/授权文献
- US20150371810A1 INDIVIDUALLY SWITCHED FIELD EMISSION ARRAYS 公开/授权日:2015-12-24
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