Invention Grant
- Patent Title: Dual phase cleaning chambers and assemblies comprising the same
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Application No.: US15003485Application Date: 2016-01-21
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Publication No.: US09748078B2Publication Date: 2017-08-29
- Inventor: Armen Avoyan , Cliff La Croix , Hong Shih
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: B08B3/00
- IPC: B08B3/00 ; B08B3/02 ; H01J21/00 ; H01J37/32 ; H01L21/00

Abstract:
In one embodiment, a dual phase cleaning chamber may include a turbulent mixing chamber, a fluid diffuser, an isostatic pressure chamber and a rupture mitigating nozzle. The turbulent mixing chamber may be in fluid communication with a first fluid inlet and a second fluid inlet. The fluid diffuser may be in fluid communication with the turbulent mixing chamber. The rupture mitigating nozzle may include a first fluid collecting offset, a second fluid collecting offset, and a displacement damping projection. The displacement damping projection may be disposed between the first and second fluid collecting offset and may be offset away from each of the first fluid collecting offset and the second fluid collecting offset, and towards the fluid diffuser. A pressurized cleaning fluid introduced from the first fluid inlet, the second fluid inlet, or both flows through the outlet passage of the first and second fluid collecting offset.
Public/Granted literature
- US20160141153A1 DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME Public/Granted day:2016-05-19
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