- 专利标题: MEMS amplitude modulator and MEMS magnetic field sensor including same
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申请号: US14913537申请日: 2014-08-05
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公开(公告)号: US09748899B2公开(公告)日: 2017-08-29
- 发明人: Chil Young Ji , Yong Jun Ko , Seung Hwa Kwon , Sang Won Seo , Chul Kim , Jeong Gi Seo , Do Han Jun , Wan Seop Choi
- 申请人: LG INNOTEK CO., LTD.
- 申请人地址: KR Seoul
- 专利权人: LG INNOTEK CO., LTD.
- 当前专利权人: LG INNOTEK CO., LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Saliwanchik, Lloyd & Eisenschenk
- 优先权: KR10-2013-0099298 20130821
- 国际申请: PCT/KR2014/007246 WO 20140805
- 国际公布: WO2015/026079 WO 20150226
- 主分类号: H03C1/00
- IPC分类号: H03C1/00 ; H03C1/46 ; G01R33/00 ; G01R33/06 ; G01R33/02 ; G01R33/028 ; G01R33/038
摘要:
The present invention provides an amplitude modulator, which is disposed in an area through which a magnetic field flows so as to modulate amplitudes, comprising: a substrate; a first driving electrode which receives a first frequency signal and a second frequency signal supplied from the substrate and carries out resonant motion by the magnetic field; and a second driving electrode for receiving the second frequency signal and carries out resonant motion by the first driving electrode and the magnetic field, wherein a modulated signal is generated by modulating the amplitudes of the first and second frequency signals through the resonant motions of the first and second driving electrodes. Therefore, since the signal generated by modulating a carrier signal through mechanical resonance according to the magnetic field is outputted, amplitude modulation can be carried out without a complicated circuit configuration. In addition, since an MEMS device is a single structure that does not include an insulating layer, a single signal is applied to one structure, thereby simplifying driving, and all the driving electrodes of both ends thereof are driven so as to double a change in variable capacitance, thereby improving sensing ability.
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