- 专利标题: Negative stiffness system for gravity compensation of micropositioner
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申请号: US14652055申请日: 2013-12-06
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公开(公告)号: US09752643B2公开(公告)日: 2017-09-05
- 发明人: Yu Zhu , Ming Zhang , Zhao Liu , Rong Cheng , Jing Wang , Li Tian , Dengfeng Xu , Kaiming Yang , Jinchun Hu , Wensheng Yin , Haihua Mu , Hao Liu , Chuxiong Hu
- 申请人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. , TSINGHUA UNIVERSITY
- 申请人地址: CN Shanghai CN Beijing
- 专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.,TSINGHUA UNIVERSITY
- 当前专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.,TSINGHUA UNIVERSITY
- 当前专利权人地址: CN Shanghai CN Beijing
- 优先权: CN201210537786 20121212
- 国际申请: PCT/CN2013/088753 WO 20131206
- 国际公布: WO2014/090115 WO 20140619
- 主分类号: F16F15/067
- IPC分类号: F16F15/067 ; G03F7/20
摘要:
A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.