- 专利标题: Optical emission system including dichroic beam combiner
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申请号: US14614381申请日: 2015-02-04
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公开(公告)号: US09752933B2公开(公告)日: 2017-09-05
- 发明人: Michael Bolles , Yin Sheng Sun , Lindsay Buck , Glyn Russell
- 申请人: AGILENT TECHNOLOGIES, INC.
- 申请人地址: US CA Santa Clara
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: G01J3/30
- IPC分类号: G01J3/30 ; G01J3/10 ; G01J3/443 ; G01J3/02 ; G01J3/12
摘要:
An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
公开/授权文献
- US20150138548A1 OPTICAL EMISSION SYSTEM INCLUDING DICHROIC BEAM COMBINER 公开/授权日:2015-05-21
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