Invention Grant
- Patent Title: Charged particle image measuring device and imaging mass spectrometry apparatus
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Application No.: US15253344Application Date: 2016-08-31
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Publication No.: US09754772B2Publication Date: 2017-09-05
- Inventor: Kota Iwasaki , Hiroyuki Hashimoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2015-173269 20150902; JP2016-153915 20160804
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/16 ; H01J49/06 ; H01J37/244 ; H01J37/12 ; H01J37/141 ; H01J49/14
Abstract:
A charged particle image measuring device includes a sample stage, a charged particle lens opposite the sample stage, a two-dimensional detector, a first diaphragm disposed between the sample stage and a position of a crossover that is formed by the charged particle lens and that is closest to a sample, and a second diaphragm disposed between the first diaphragm and the two-dimensional detector.
Public/Granted literature
- US20170062196A1 CHARGED PARTICLE IMAGE MEASURING DEVICE AND IMAGING MASS SPECTROMETRY APPARATUS Public/Granted day:2017-03-02
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