- Patent Title: Fin cutting process for manufacturing FinFET semiconductor devices
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Application No.: US15056513Application Date: 2016-02-29
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Publication No.: US09754792B1Publication Date: 2017-09-05
- Inventor: Garo Jacques Derderian
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/308

Abstract:
One illustrative method disclosed herein includes, among other things, forming an original fin-formation etch mask comprised of a plurality of original line-type features and removing at least a portion of at least one of the plurality of original line-type features so as to thereby define a modified fin-formation etch mask comprising the remaining portions of the plurality of original line-type features. The method also includes forming a conformal layer of material on the remaining portions of the plurality of original line-type features of the modified fin-formation etch mask and performing at least one etching process to remove at least portions of the conformal layer of material and to define a plurality of fin-formation trenches so as to thereby initially define a plurality of fins in the substrate.
Public/Granted literature
- US20170250088A1 FIN CUTTING PROCESS FOR MANUFACTURING FINFET SEMICONDUCTOR DEVICES Public/Granted day:2017-08-31
Information query
IPC分类: