Invention Grant
- Patent Title: Metallizing MEMS devices
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Application No.: US14963998Application Date: 2015-12-09
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Publication No.: US09758367B2Publication Date: 2017-09-12
- Inventor: Bradley C. Kaanta
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L23/02
- IPC: H01L23/02 ; B81B7/00 ; B81C1/00
Abstract:
Various embodiments produce a semiconductor device, such a MEMS device, having metallized structures formed by replacing a semiconductor structure with a metal structure. Some embodiments expose a semiconductor structure to one or more a reacting gasses, such as gasses including tungsten or molybdenum.
Public/Granted literature
- US20170166439A1 Metallizing MEMS Devices Public/Granted day:2017-06-15
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