Process for the preparation of hexachlorodisilane by cleavage of higher polychlorosilanes such as octachlorotrisilane
Abstract:
The invention relates to a process for converting polychlorosilanes into hexachlorodisilane, by one or more trimeric polychlorosilanes or a trimeric polychlorosilane in a mixture with higher molecular weight polychlorosilanes being exposed to a gas discharge and hexachlorodisilane being formed and isolated.
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