- 专利标题: Vibration robust x-axis ring gyro transducer
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申请号: US13362873申请日: 2012-01-31
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公开(公告)号: US09759563B2公开(公告)日: 2017-09-12
- 发明人: Heinz Loreck , Keith L. Kraver , Gary G. Li , Yizhen Lin
- 申请人: Heinz Loreck , Keith L. Kraver , Gary G. Li , Yizhen Lin
- 申请人地址: US TX Austin
- 专利权人: NXP USA, Inc.
- 当前专利权人: NXP USA, Inc.
- 当前专利权人地址: US TX Austin
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5733 ; G01C19/574
摘要:
A micro-electromechanical systems (MEMS) transducer (100, 700) is adapted to use lateral axis vibration to generate non-planar oscillations in a pair of teeter-totter sense mass structures (120/140, 720/730) in response to rotational movement of the transducer about the rotation axis (170, 770) with sense electrodes connected to add pickups (e.g., 102/107, 802/807) diagonally from the pair of sense mass structures to cancel out signals associated with rotation vibration.
公开/授权文献
- US20130192363A1 Vibration Robust X-Axis Ring Gyro Transducer 公开/授权日:2013-08-01
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