Invention Grant
- Patent Title: Particle and chemical control using tunnel flow
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Application No.: US14034273Application Date: 2013-09-23
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Publication No.: US09759912B2Publication Date: 2017-09-12
- Inventor: Frank Chilese , Gildardo R. Delgado , Daniel Wack , John R. Torczynski , Leonard E. Klebanoff
- Applicant: KLA-Tencor Corporation , Sandia Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Simpson & Simpson, PLLC
- Main IPC: G02B27/00
- IPC: G02B27/00

Abstract:
An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.
Public/Granted literature
- US20140085724A1 PARTICLE AND CHEMICAL CONTROL USING TUNNEL FLOW Public/Granted day:2014-03-27
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