- 专利标题: Planar motor rotor displacement measuring device and its measuring method
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申请号: US14379106申请日: 2013-02-08
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公开(公告)号: US09766054B2公开(公告)日: 2017-09-19
- 发明人: Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
- 申请人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. , TSINGHUA UNIVERSITY
- 申请人地址: CN Shanghai CN Beijing
- 专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.,TSINGHUA UNIVERSITY
- 当前专利权人: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.,TSINGHUA UNIVERSITY
- 当前专利权人地址: CN Shanghai CN Beijing
- 优先权: CN201210038659 20120217
- 国际申请: PCT/CN2013/071580 WO 20130208
- 国际公布: WO2013/120451 WO 20130822
- 主分类号: G01B7/30
- IPC分类号: G01B7/30 ; G01M13/00 ; G01D5/20 ; G03F7/20
摘要:
A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.