- 专利标题: Method for electronically activating a measurement stand, and measurement stand for supporting a measuring probe
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申请号: US14617349申请日: 2015-02-09
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公开(公告)号: US09772205B2公开(公告)日: 2017-09-26
- 发明人: Helmut Fischer
- 申请人: Helmut Fischer GmbH Institut fur Elektronik und Messtechnik
- 申请人地址: DE Sindelfingen
- 专利权人: Helmut Fischer GmbH Institut für Elektronik und Messtechnik
- 当前专利权人: Helmut Fischer GmbH Institut für Elektronik und Messtechnik
- 当前专利权人地址: DE Sindelfingen
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: DE102014101577 20140207
- 主分类号: G01B7/06
- IPC分类号: G01B7/06 ; G01D11/30 ; G01B5/06
摘要:
A method for electrically activating a measurement stand with a movement of at least one measuring probe (26) from a starting position (31) into a measuring position (32) and also a measurement stand for supporting a measuring probe, in particular for measuring the thickness of thin layers, in which a motor (34) is activated by a control arrangement (25), which moves a ram (23) up and down via a drive arrangement (35), wherein a retainer (24) is provided on the ram (23), to which retainer the measuring probe (26) can be fastened, in which a freewheel is activated between the drive arrangement (35) and the ram (33) as soon as the measuring probe (26) or retainer (23) is set down in the measuring position (32) on an item to be measured (14) and the movement of the drive arrangement (35) is decoupled from the vertical movement of the ram (23), wherein a movement speed of the at least one measuring probe (14) from the starting position (31) into the measuring position (32) is reduced by mechanical damping or electrical damping before the measuring position (32) is reached.
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