Invention Grant
- Patent Title: Electron microscope
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Application No.: US15196149Application Date: 2016-06-29
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Publication No.: US09773639B2Publication Date: 2017-09-26
- Inventor: Kazuya Yamazaki
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2015-130715 20150630
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/18 ; H01J37/244 ; H01J37/10

Abstract:
There is provided an electron microscope capable of easily achieving power saving. The electron microscope (100) includes a controller (60) for switching the mode of operation of the microscope from a first mode where electron lenses (12, 14, 18, 20) are activated to a second mode where the electron lenses (12, 14, 18, 20) are not activated. During this operation for making a switch from the first mode to the second mode, the controller (60) performs the steps of: closing a first vacuum gate valve (50), opening a second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) of the microscope by the second vacuum pumping unit (40); then controlling a heating section (26) to heat an adsorptive member (242); then opening the first vacuum gate valve (50), closing the second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) by the first vacuum pumping unit (30); and turning off the electron lenses (12, 14, 18, 20).
Public/Granted literature
- US20170025244A1 Electron Microscope Public/Granted day:2017-01-26
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