Invention Grant
- Patent Title: Method and device for generating an electrical discharge
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Application No.: US14923303Application Date: 2015-10-26
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Publication No.: US09773650B2Publication Date: 2017-09-26
- Inventor: Walter May
- Applicant: CemeCon AG
- Applicant Address: DE Würselen
- Assignee: CemeCon AG
- Current Assignee: CemeCon AG
- Current Assignee Address: DE Würselen
- Agency: Flaster/Greenberg P.C.
- Priority: DE102014115492 20141024
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34 ; H01J37/32 ; H05H1/48 ; C23F4/04

Abstract:
A device and method for generating an electrical discharge are described. A first electrode (30) is operated to be a cathode relative to a second electrode (16). A gas is introduced into the chamber (14) by the first electrode (30). The first electrode (30) has a closed antechamber (32) with a metal wall (34). A tube (36) consisting of a different material than the wall (34) is provided through which the gas from the antechamber (32) is conducted into the chamber (14). A front portion of the tube (36) is embedded in the wall (34) of the antechamber (32). In its rear portion, the tube (36) has a free end projecting into the antechamber (32). A stable electrical discharge can be generated thereby in a particularly easy manner.
Public/Granted literature
- US20160118231A1 Method and Device for Generating an Electrical Discharge Public/Granted day:2016-04-28
Information query
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