Invention Grant
- Patent Title: Substrate conveying system
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Application No.: US14410532Application Date: 2013-06-10
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Publication No.: US09773691B2Publication Date: 2017-09-26
- Inventor: Kenji Bando , Takuya Fukuda , Soichi Tamada
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Applicant Address: JP Kobe-shi
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe-shi
- Agency: Oliff PLC
- Priority: JP2012-139883 20120621
- International Application: PCT/JP2013/003636 WO 20130610
- International Announcement: WO2013/190800 WO 20131227
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; B65G19/02 ; B65G49/06 ; H01L21/673

Abstract:
A substrate conveying system includes a substrate supply unit including a movable rack and an up-down unit which moves the movable rack down, a lift unit which has one or more ejection holes which eject a gas upward and is configured to lift-up the substrate supported on the movable rack by the pressure of the gas ejected through ejection holes when the up-down unit moves the movable rack down, and a conveying unit which includes a conveyor, and hook elements extending upward from the conveyor, and is configured to push in a conveying direction the substrate W being lifted-up by the pressure of the gas ejected through the ejection holes.
Public/Granted literature
- US20150311103A1 SUBSTRATE CONVEYING SYSTEM Public/Granted day:2015-10-29
Information query
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