Invention Grant
- Patent Title: Semiconductor structures including rails of dielectric material
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Application No.: US15150734Application Date: 2016-05-10
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Publication No.: US09773734B2Publication Date: 2017-09-26
- Inventor: David H. Wells , Gurtej S. Sandhu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/532 ; H01L21/3205 ; H01L21/306 ; H01L21/223 ; H01L29/04 ; H01L29/167 ; H01L21/768 ; H01L21/761 ; H01L29/06 ; H01L21/84 ; H01L27/102 ; H01L45/00 ; H01L27/12 ; H01L27/24 ; H01L21/74

Abstract:
Methods of forming semiconductor structures that include bodies of a semiconductor material disposed between rails of a dielectric material are disclosed. Such methods may include filling a plurality of trenches in a substrate with a dielectric material and removing portions of the substrate between the dielectric material to form a plurality of openings. In some embodiments, portions of the substrate may be undercut to form a continuous void underlying the bodies and the continuous void may be filled with a conductive material. In other embodiments, portions of the substrate exposed within the openings may be converted to a silicide material to form a conductive material under the bodies. For example, the conductive material may be used as a conductive line to electrically interconnect memory device components. Semiconductor structures and devices formed by such methods are also disclosed.
Public/Granted literature
- US20160260664A1 SEMICONDUCTOR STRUCTURES INCLUDING RAILS OF DIELECTRIC MATERIAL Public/Granted day:2016-09-08
Information query
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