Invention Grant
- Patent Title: Vertical access devices, semiconductor device structures, and related methods
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Application No.: US14190807Application Date: 2014-02-26
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Publication No.: US09773888B2Publication Date: 2017-09-26
- Inventor: Srinivas Pulugurtha , Haitao Liu , Sanh D. Tang , Wolfgang Mueller , Sourabh Dhir
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/66 ; H01L29/78

Abstract:
A vertical access device comprises a semiconductive base comprising a first source/drain region, a semiconductive pillar extending vertically from the semiconductive base, and a gate electrode adjacent a sidewall of the semiconductive pillar. The semiconductive pillar comprises a channel region overlying the first source/drain region, and a second source/drain region overlying the channel region. An opposing sidewall of the semiconductive pillar is not adjacent the gate electrode or another gate electrode. Semiconductive device structures, methods of forming a vertical access device, and methods of forming a semiconductive structure are also described.
Public/Granted literature
- US20150243748A1 VERTICAL ACCESS DEVICES, SEMICONDUCTOR DEVICE STRUCTURES, AND RELATED METHODS Public/Granted day:2015-08-27
Information query
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