- 专利标题： Hand member and hand
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申请号： US15337073申请日： 2016-10-28
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公开(公告)号： US09776333B2公开(公告)日： 2017-10-03
- 发明人: Tetsuya Sakai , Hideki Sakaue
- 申请人： Hirata Corporation
- 申请人地址： JP Kumamoto-Shi, Kumamoto-Ken
- 专利权人： HIRATA CORPORATION
- 当前专利权人： HIRATA CORPORATION
- 当前专利权人地址： JP Kumamoto-Shi, Kumamoto-Ken
- 代理机构： Buchanan Ingersoll & Rooney PC
- 优先权： JP2015-228949 20151124
- 主分类号： H01L21/687
- IPC分类号： H01L21/687 ; B25J15/00 ; B25J11/00
摘要：
A hand member forms a hand of a robot arm for transferring a semiconductor wafer. The hand member is a U-shaped member on which the semiconductor wafer is placed. The hand member includes at least one fitting portion on which a frictional holding member for holding the semiconductor wafer is fitted sideways, on each of an inner edge and an outer edge.
公开/授权文献
- US20170144313A1 Hand Member and Hand 公开/授权日：2017-05-25
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