Invention Grant
- Patent Title: Sensing chip
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Application No.: US14831248Application Date: 2015-08-20
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Publication No.: US09778183B2Publication Date: 2017-10-03
- Inventor: Ding-Zheng Lin , Yi-Ping Chen , Ping-Chen Chen
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01N21/65 ; G01N21/552 ; B82Y20/00

Abstract:
A sensing chip is provided, which includes a substrate and a plurality of nano structures periodically arranged on the substrate, wherein each of the nano structures includes a bottom metal layer disposed on the substrate, a middle dielectric layer disposed on the bottom metal layer, and a top metal layer disposed on the middle dielectric layer. The bottom metal layer has an area that is larger than that of the top metal layer.
Public/Granted literature
- US20170052114A1 SENSING CHIP Public/Granted day:2017-02-23
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