Invention Grant
- Patent Title: Apparatus, a device and a device manufacturing method
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Application No.: US15033580Application Date: 2014-11-04
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Publication No.: US09778574B2Publication Date: 2017-10-03
- Inventor: Sander Catharina Reinier Derks , Eric Willem Felix Casimiri , Marcel Mathijs Theodore Dierichs , Sumant Sukdew Ramanujan Oemrawsingh , Wilhelmus Theodorus Anthonius Johannes Van Den Einden , Johannes Fransiscus Maria Velthuis , Alexander Nikolov Zdravkov , Wassim Zein Eddine
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP13194257 20131125; EP14174030 20140626
- International Application: PCT/EP2014/073643 WO 20141104
- International Announcement: WO2015/074859 WO 20150528
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20 ; G02B5/00 ; G02B5/20 ; G02B5/22 ; H05G2/00 ; H01J5/18

Abstract:
An apparatus comprising at least one sealing aperture (40) comprising a hollow part (41), having an inner surface (42), extending at an interface between different zones (50;60) of the apparatus; and a member (43) positioned in the hollow part configured to substantially transmit EUV radiation and to substantially filter non-EUV radiation at the interface; wherein the inner surface of the hollow part has a surface treatment configured to increase absorption of the non-EUV radiation that is transferred by the member to the hollow part.
Public/Granted literature
- US20160282723A1 An Apparatus, a Device and a Device Manufacturing Method Public/Granted day:2016-09-29
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