Invention Grant
- Patent Title: Semiconductor arrangement for a FinFET and method for manufacturing the same
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Application No.: US14411073Application Date: 2014-01-16
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Publication No.: US09780200B2Publication Date: 2017-10-03
- Inventor: Huilong Zhu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Christensen, Fonder, Dardi & Herbert PLLC
- Priority: CN201310627406 20131128
- International Application: PCT/CN2014/070713 WO 20140116
- International Announcement: WO2015/078104 WO 20150604
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/62 ; H01L29/78 ; H01L21/762

Abstract:
A semiconductor arrangement and a method for manufacturing the same. An arrangement may include a bulk semiconductor substrate; a fin formed on the substrate; a first FinFET and a second FinFET formed on the substrate. The first FinFET comprises a first gate stack intersecting the fin and a first gate spacer disposed on sidewalls of the first gate stack. The second FinFET includes a second gate stack intersecting the fin and a second gate spacer disposed on sidewalls of the second gate stack; a dummy gate spacer formed between the first FinFET and the second FinFET and intersecting the fin; an isolation section self-aligned to a space defined by the dummy gate spacer. The isolation section electrically isolates the first FinFET from the second FinFET; and an insulation layer disposed under and abutting the isolation section.
Public/Granted literature
- US20160268392A1 SEMICONDUCTOR ARRANGEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-09-15
Information query
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