Invention Grant
- Patent Title: Mask frame assembly for thin film deposition
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Application No.: US14576394Application Date: 2014-12-19
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Publication No.: US09780305B2Publication Date: 2017-10-03
- Inventor: Hanul Kwen , Junghoon Kim , Hanyoung Kim , Younghoon Roh , Wooyoung Jung , Cheolgyu Jeong , Pilseon Ji , Jaemin Hong
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Lee & Morse P.C.
- Priority: KR10-2014-0083896 20140704
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C16/04 ; H01L51/00 ; H01L51/56

Abstract:
Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.
Public/Granted literature
- US20160005970A1 MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION Public/Granted day:2016-01-07
Information query
IPC分类: