X-ray fluorescence analyzer and measurement position adjusting method therefore
Abstract:
An X-ray fluorescence analyzer is provided with: a sample stage on which a sample subjected to an analysis is mounted; an X-ray source configured to irradiate the sample with primary X-rays; a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays; an imaging unit configured to capture an image of a predetermined field-of-view area on the sample stage; a display unit configured to display the field-of-view area of the image captured by the imaging unit; and a pointer irradiation unit configured to irradiate the sample stage with a visible light at an irradiation position within an area that is outside the field-of-view area and near the field-of-view area.
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