Invention Grant
- Patent Title: Techniques and apparatus for manipulating an ion beam
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Application No.: US14849813Application Date: 2015-09-10
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Publication No.: US09793087B2Publication Date: 2017-10-17
- Inventor: James S. Buff , Victor Benveniste , Frank Sinclair
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/147
- IPC: H01J37/147 ; H01J37/14 ; H01J37/317

Abstract:
A method may include: generating an ion beam from an ion source, the ion beam having an initial direction of propagation; deflecting the ion beam at an initial angle of inclination with respect to the initial direction of propagation; passing the ion beam through an aperture in a magnetic assembly; and generating in the aperture, a quadrupole field extending along a first direction perpendicular to the initial direction of propagation of the ion beam, and a dipole field extending along a second direction perpendicular to the first direction and the initial direction of propagation.
Public/Granted literature
- US20170076908A1 TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM Public/Granted day:2017-03-16
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