- 专利标题: Patterning by stamped metal resist
-
申请号: US12331062申请日: 2008-12-09
-
公开(公告)号: US09793481B2公开(公告)日: 2017-10-17
- 发明人: Stephen R. Forrest , Momchil T. Mihnev , Andre D. Taylor , Xin Xu
- 申请人: Stephen R. Forrest , Momchil T. Mihnev , Andre D. Taylor , Xin Xu
- 申请人地址: US MI Ann Arbor
- 专利权人: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- 当前专利权人: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- 当前专利权人地址: US MI Ann Arbor
- 代理机构: Riverside Law LLP
- 主分类号: H01L51/00
- IPC分类号: H01L51/00
摘要:
A method is provided. A first layer is provided over a substrate, the first layer comprising a first material. A patterned second layer is applied over the first layer via stamping. The second layer comprising a second material. The second layer covers a first portion of the first layer, and does not cover a second portion of the first layer. The second portion of the first layer is removed via a subtractive process while the first portion of the first layer is protected from removal by the patterned second layer.
公开/授权文献
- US20100080914A1 PATTERNING BY STAMPED METAL RESIST 公开/授权日:2010-04-01
信息查询
IPC分类: