- 专利标题: Microphone and method of manufacturing a structure for delaying the phase of sound input
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申请号: US14852574申请日: 2015-09-13
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公开(公告)号: US09807531B2公开(公告)日: 2017-10-31
- 发明人: Ilseon Yoo , Hyunsoo Kim , Yong Sung Lee
- 申请人: Hyundai Motor Company
- 申请人地址: KR Seoul
- 专利权人: Hyundai Motor Company
- 当前专利权人: Hyundai Motor Company
- 当前专利权人地址: KR Seoul
- 代理机构: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- 代理商 Peter F. Corless
- 优先权: KR10-2014-0166784 20141126
- 主分类号: H04R17/02
- IPC分类号: H04R17/02 ; H04R19/00 ; H04R31/00 ; H04R19/04
摘要:
A microphone and a method of manufacturing the microphone are provided. The method includes; preparing a substrate and forming a vibrating membrane having an oxide film and a plurality of slots onto the substrate. A sacrificial layer and a fixed membrane is formed over the vibrating membrane and air intake apertures are formed through the fixed membrane. A first pad is connected to the fixed membrane, a second pad is connected to the vibrating membrane, and a phase delay unit is bonded to the bonding pad. A penetration aperture may be formed by etching the rear side of the substrate and bonding the phase delay unit on the bonding pad. A sound passage, is formed by connecting passage patterns, and sound apertures with the sound passages by sequentially stacking phase delay layers on the bonding pad and simultaneously forming the passage patterns in the phase delay layers.
公开/授权文献
- US20160150326A1 MICROPHONE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2016-05-26
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