Invention Grant
- Patent Title: Micromechanical device for electromagnetic radiation sensing
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Application No.: US14810363Application Date: 2015-07-27
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Publication No.: US09810581B1Publication Date: 2017-11-07
- Inventor: Marek Steffanson
- Applicant: MP High Tech Solutions Pty Ltd
- Applicant Address: AU Eveleigh
- Assignee: MP HIGH TECH SOLUTIONS PTY LTD
- Current Assignee: MP HIGH TECH SOLUTIONS PTY LTD
- Current Assignee Address: AU Eveleigh
- Agency: Greenberg Traurig, LLP
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/10

Abstract:
Systems, methods, and apparatus for providing an improved electromagnetic radiation sensing micromechanical device to be utilized in high pixel-density pixel sensor arrays. The device includes an improved design for improved and adjustable performance through simple geometric or fabrication means. Furthermore, the design of the device lends itself to simple micromechanical manufacturing procedures. Additionally, the manufacturing procedures include a method to enable high uniformity and high yield sensor arrays. Arrays of the device can be utilized as IR imaging detectors for use in applications such as human presence detection, nonvisual environment monitoring, security and safety, surveillance, energy monitoring, fire detection and people counting.
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