- 专利标题: Semiconductor memory device having memory cells provided in a height direction
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申请号: US14849061申请日: 2015-09-09
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公开(公告)号: US09812398B2公开(公告)日: 2017-11-07
- 发明人: Ming Hu , Toshiyuki Takewaki , Seiichi Omoto
- 申请人: Toshiba Memory Corporation
- 申请人地址: JP Minato-ku
- 专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L31/036 ; H01L31/112 ; H01L23/532 ; H01L27/11582 ; H01L27/1157
摘要:
According to an embodiment, a semiconductor memory device comprises: a memory string comprising a plurality of memory cells connected in series therein; and a contact electrically connected to one end of the memory string. The memory string comprises a plurality of control gate electrodes, and a semiconductor layer. The contact comprises a contact layer, the contact layer having a plate-like shape whose longer direction is a first direction parallel to the substrate, and the contact layer having its lower surface electrically connected to the one end of the semiconductor layer. Moreover, the contact layer includes a metal layer, a silicon based layer, and a second conductive layer. The metal layer includes tungsten. The silicon based layer includes a material including silicon. The second conductive layer covers side surfaces of the metal layer and the silicon based layer.
公开/授权文献
- US20160268191A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2016-09-15
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