发明授权
- 专利标题: Integrated fan-out package, semiconductor device, and method of fabricating the same
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申请号: US15257920申请日: 2016-09-07
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公开(公告)号: US09812426B1公开(公告)日: 2017-11-07
- 发明人: Chin-Te Wang , Cheng-Hsien Hsieh , Hsien-Wei Chen , Li-Han Hsu , Tzu-Shiun Sheu , Wei-Cheng Wu , Yan-Fu Lin
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/00 ; H01L25/00
摘要:
A semiconductor device including an integrated circuit, a protection layer, and a conductive via is provided. The integrated circuit includes at least one conductive pad. The protection layer covers the integrated circuit. The protection layer includes a contact opening, and the conductive pad is exposed by the contact opening of the protection layer. The conductive via is embedded in the contact opening of the protection layer, and the conductive via is electrically connected to the conductive pad through the contact opening. A method of fabricating the above-mentioned semiconductor device and an integrated fan-out package including the above-mentioned semiconductor device are also provided.
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