- 专利标题: Aerogel-encapsulated image sensor and manufacturing method for same
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申请号: US14639610申请日: 2015-03-05
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公开(公告)号: US09812478B2公开(公告)日: 2017-11-07
- 发明人: Chun-Sheng Fan , Wei-Feng Lin
- 申请人: OmniVision Technologies, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Lathrop Gage LLP
- 主分类号: H01L31/0216
- IPC分类号: H01L31/0216 ; H01L27/146
摘要:
An aerogel-encapsulated image sensor includes a device die with an image sensor fabricated thereon and an aerogel layer that encapsulates the image sensor. A method for encapsulating image sensor pixel arrays of respective bare image sensors formed on a sensor array sheet may include injecting an uncured aerogel portion on each image sensor pixel array, and curing each uncured aerogel portion. The step of curing may include at least one of (a) super-critical drying, (b) surface-modification drying, and (c) pinhole drying an uncured aerogel portion. The method may further include singulating the sensor array sheet into a plurality of aerogel-encapsulated image sensors. A method for encapsulating image sensor pixel arrays of respective bare image sensors on a device wafer may include forming an aerogel layer on each bare image sensor. The step of forming may include at least one of spin-coating, dip-coating, and spray-coating the aerogel layer.
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