Magnetic bearing device and vacuum pump
摘要:
A magnetic bearing device includes first and second radial electromagnets supporting a rotor shaft in a contactless manner in first and second radial directions. A controller controls each of a first excitation amplifier and a second excitation amplifier based on a result of demodulation by each of a first demodulation section and a second demodulation section. The phase of a second carrier signal differs by (π/2+θ) radian from the phase of a first carrier signal. A first demodulation section samples a detection signal of a first current sensor at sampling timing shifted by a phase θ from timing at which a first carrier signal becomes a peak, and a second demodulation section samples the detection signal of a second current sensor at sampling timing shifted by a phase (−θ) from timing at which the second carrier signal becomes a peak.
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