- 专利标题: Magnetic bearing device and vacuum pump
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申请号: US15424039申请日: 2017-02-03
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公开(公告)号: US09816514B2公开(公告)日: 2017-11-14
- 发明人: Junichiro Kozaki
- 申请人: Shimadzu Corporation
- 申请人地址: JP Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Renner Otto Boisselle & Sklar, LLP
- 优先权: JP2013-168546 20130814
- 主分类号: F04D19/04
- IPC分类号: F04D19/04 ; F04D29/058 ; F16C32/04 ; F04D27/00
摘要:
A magnetic bearing device includes first and second radial electromagnets supporting a rotor shaft in a contactless manner in first and second radial directions. A controller controls each of a first excitation amplifier and a second excitation amplifier based on a result of demodulation by each of a first demodulation section and a second demodulation section. The phase of a second carrier signal differs by (π/2+θ) radian from the phase of a first carrier signal. A first demodulation section samples a detection signal of a first current sensor at sampling timing shifted by a phase θ from timing at which a first carrier signal becomes a peak, and a second demodulation section samples the detection signal of a second current sensor at sampling timing shifted by a phase (−θ) from timing at which the second carrier signal becomes a peak.
公开/授权文献
- US20170146016A1 MAGNETIC BEARING DEVICE AND VACUUM PUMP 公开/授权日:2017-05-25
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