Invention Grant
- Patent Title: Arc lamp and substrate heating apparatus having the arc lamp
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Application No.: US15094358Application Date: 2016-04-08
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Publication No.: US09818596B2Publication Date: 2017-11-14
- Inventor: Gon-Su Kang , Sung-Ho Kang , Min-Chul Kim , Sun-Ho Ryu , Kwang-jun Lee , Yong-Hun Lee , Ju-Hong Lee , Sun-Hong Choi , Sang-Cheol Ha
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0116154 20150818
- Main IPC: H01J61/52
- IPC: H01J61/52 ; H01L21/67 ; H01J61/06

Abstract:
An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.
Public/Granted literature
- US20170053791A1 Arc Lamp and Substrate Heating Apparatus Having the Arc Lamp Public/Granted day:2017-02-23
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