Invention Grant
- Patent Title: Formation of buried color filters in a back side illuminated image sensor using an etching-stop layer
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Application No.: US15409721Application Date: 2017-01-19
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Publication No.: US09825085B2Publication Date: 2017-11-21
- Inventor: Yun-Wei Cheng , Chen Chiu-Jung , Volume Chien , Kuo-Cheng Lee , Yung-Lung Hsu , Chen Hsin-Chi
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A buffer layer is disposed over the second side of the substrate. A plurality of elements is disposed over the buffer layer. The elements and the buffer layer have different material compositions. A plurality of light-blocking structures is disposed over the plurality of elements, respectively. The radiation-sensing regions are respectively aligned with a plurality of openings defined by the light-blocking structures, the elements, and the buffer layer.
Public/Granted literature
- US20170133429A1 FORMATION OF BURIED COLOR FILTERS IN A BACK SIDE ILLUMINATED IMAGE SENSOR USING AN ETCHING-STOP LAYER Public/Granted day:2017-05-11
Information query
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