Invention Grant
- Patent Title: Cobalt dishing control agents
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Application No.: US14919490Application Date: 2015-10-21
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Publication No.: US09834704B2Publication Date: 2017-12-05
- Inventor: Steven Kraft , Andrew Wolff , Phillip W. Carter , Benjamin Petro
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Francis J. Koszyk
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; H01L21/321

Abstract:
The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt corrosion inhibitor, (c) a cobalt dishing control agent, wherein the cobalt dishing control agent comprises an anionic head group and a C13-C20 aliphatic tail group, (d) an oxidizing agent that oxidizes cobalt, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.
Public/Granted literature
- US20160108285A1 COBALT DISHING CONTROL AGENTS Public/Granted day:2016-04-21
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