发明授权
- 专利标题: Surface roughness sensor apparatus and processing tool structure using the same
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申请号: US14994259申请日: 2016-01-13
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公开(公告)号: US09841267B2公开(公告)日: 2017-12-12
- 发明人: Jin Oh Kim , Jeong Gil Hwang
- 申请人: Soongsil University Research Consortium Techno-Park
- 申请人地址: KR Seoul
- 专利权人: SOONGSIL UNIVERSITY RESEARCH CONSORTIUM TECHNO-PARK
- 当前专利权人: SOONGSIL UNIVERSITY RESEARCH CONSORTIUM TECHNO-PARK
- 当前专利权人地址: KR Seoul
- 代理机构: Pearne & Gordon LLP
- 优先权: KR10-2015-0017429 20150204
- 主分类号: G01B7/34
- IPC分类号: G01B7/34 ; G01B5/28
摘要:
The present disclosure relates to a surface roughness sensor apparatus. The surface roughness sensor apparatus includes: a rotatable rotation shaft; a piezoelectric sensor provided along a circumference of the rotation shaft, rotated by rotation of the rotation shaft, and configured to generate a sensing signal in response to a pressure applied by a surface of an object as being in direct contact with the surface of the object; and a signal transfer unit configured to transfer the sensing signal generated and transmitted by the piezoelectric sensor to the outside of the sensor apparatus, and the piezoelectric sensor may be rotated in a direction in which a relative movement between the piezoelectric sensor and the surface of the object is made at a contact point with the object to minimize damage to the surface of the object.
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