Invention Grant
- Patent Title: Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances
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Application No.: US14611062Application Date: 2015-01-30
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Publication No.: US09841393B2Publication Date: 2017-12-12
- Inventor: Antonello Santangelo , Salvatore Cascino , Roberto Modica , Viviana Cerantonio , Maurizio Moschetti
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2014A0075 20140131
- Main IPC: G01N27/22
- IPC: G01N27/22

Abstract:
A sensor of volatile substances including: a sensitive layer, of a sensitive material that is permeable to a volatile substance and has an electrical permittivity depending upon a concentration of the volatile substance absorbed; a first electrode structure and a second electrode structure capacitively coupled together and arranged so that a capacitance between the first electrode structure and the second electrode structure is affected by the electrical permittivity of the sensitive material; and a supply device, configured to supply a heating current through one between the first electrode structure and the second electrode structure in a first operating condition, so as to heat the sensitive layer.
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