Invention Grant
- Patent Title: Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport
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Application No.: US13254854Application Date: 2010-03-04
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Publication No.: US09845532B2Publication Date: 2017-12-19
- Inventor: Jan Rudolf Van Ommen
- Applicant: Jan Rudolf Van Ommen
- Applicant Address: NL Delft
- Assignee: Delft University of Technology
- Current Assignee: Delft University of Technology
- Current Assignee Address: NL Delft
- Agency: Foley & Lardner LLP
- Priority: NL2002590 20090304
- International Application: PCT/EP2010/052769 WO 20100304
- International Announcement: WO2010/100235 WO 20100910
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455

Abstract:
The invention provides a process for depositing a coating onto particles being pneumatically transported in a tube. The process comprising the steps of providing a tube having an inlet opening and an outlet opening; feeding a carrier gas entraining particles into the tube at or near the inlet opening of the tube to create a particle flow through the tube; and injecting a first self-terminating reactant into the tube via at least one injection point downstream from the inlet opening of the tube for reaction with the particles in the particle flow. The process is suitable for atomic layer deposition and molecular layer deposition. An apparatus for carrying out the process is also disclosed.
Public/Granted literature
- US20120009343A1 APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO PARTICLES DURING PNEUMATIC TRANSPORT Public/Granted day:2012-01-12
Information query
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