Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
-
Application No.: US15259941Application Date: 2016-09-08
-
Publication No.: US09847346B2Publication Date: 2017-12-19
- Inventor: Changhyun Lee , Heonkyu Lee , Shinhwan Kang , Youngwoo Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0132517 20150918
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L27/11582 ; H01L27/11565 ; H01L27/11556 ; H01L27/11519

Abstract:
A three-dimensional semiconductor memory device includes a stack on a substrate including electrodes vertically stacked on a substrate, lower insulating patterns disposed between the stack and the substrate, the lower insulating patterns being adjacent to both sidewalls of the stack and being spaced apart from each other, a plurality of vertical structures penetrating the stack and being connected to the substrate, and a data storing pattern between the stack and the vertical structures, the data storing pattern including a portion disposed between the lowermost one of the electrodes and the substrate.
Public/Granted literature
- US20170084696A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-03-23
Information query
IPC分类: