Invention Grant
- Patent Title: Corrosion resistant chip sidewall connection with crackstop and hermetic seal
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Application No.: US15017004Application Date: 2016-02-05
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Publication No.: US09852959B2Publication Date: 2017-12-26
- Inventor: John A. Fitzsimmons , Michael J. Shapiro , Natalia Borjemscaia , Vincent McGahay
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H01L23/26
- IPC: H01L23/26 ; H01L23/535 ; H01L23/00 ; H01L23/31

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to corrosion resistant chip sidewall connections with crackstop structures with a hermetic seal, and methods of manufacture. The structure includes: a guard ring structure surrounding an active region of an integrated circuit chip; an opening formed in the guard ring structure; and a hermetic seal encapsulating the opening and a portion of the guard ring structure, the hermetic seal being structured to prevent moisture ingress to the active region of the integrated circuit chip through the opening.
Public/Granted literature
- US20170229362A1 CORROSION RESISTANT CHIP SIDEWALL CONNECTION WITH CRACKSTOP AND HERMETIC SEAL Public/Granted day:2017-08-10
Information query
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