Invention Grant
- Patent Title: Non-volatile memory and manufacturing method thereof
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Application No.: US14817187Application Date: 2015-08-03
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Publication No.: US09859291B2Publication Date: 2018-01-02
- Inventor: Tzung-Wen Cheng , Yu-Ming Cheng
- Applicant: IoTMemory Technology Inc. , Tzung-Wen Cheng , Yu-Ming Cheng
- Applicant Address: TW Taipei TW Taipei TW Taipei
- Assignee: IoTMemory Technology Inc.,Tzung-Wen Cheng,Yu-Ming Cheng
- Current Assignee: IoTMemory Technology Inc.,Tzung-Wen Cheng,Yu-Ming Cheng
- Current Assignee Address: TW Taipei TW Taipei TW Taipei
- Agency: Jianq Chyun IP Office
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11524

Abstract:
A non-volatile memory having memory cells is provided. A stacked gate structure has gate dielectric layer, assist gate, insulation layer, and erase gate disposed in order. The floating gate is disposed on a first sidewall of the stacked gate structure, the floating gate has a corner portion at the top portion, and erase gate covers the corner portion. The tunneling dielectric layer is disposed under the floating gate. The erase gate dielectric layer is disposed between the erase gate and the floating gate. The assist gate dielectric layer is disposed between the assist gate and the floating gate. The source region and the drain region are respectively disposed at two sides of the stacked structure and the floating gate. The control gate is disposed on the source region and the floating gate. The inter-gate dielectric layer is disposed between the control gate and the floating gate.
Public/Granted literature
- US20170040334A1 NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-02-09
Information query
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