Invention Grant
- Patent Title: Methods and apparatus for glass removal in CMOS image sensors
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Application No.: US15070952Application Date: 2016-03-15
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Publication No.: US09859322B2Publication Date: 2018-01-02
- Inventor: Pao-Tung Chen , Szu-Ying Chen , Dun-Nian Yaung , Jen-Cheng Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/304
- IPC: H01L21/304 ; H01L27/146

Abstract:
Methods for glass removal while forming CMOS image sensors. A method for forming a device is provided that includes forming a plurality of pixel arrays on a device wafer; bonding a carrier wafer to a first side of the device wafer; bonding a substrate over a second side of the device wafer; thinning the carrier wafer; forming electrical connections to the first side of the device wafer; subsequently de-bonding the substrate from the second side of the device wafer; and subsequently singulating individuals ones of the plurality of pixel arrays from the device wafer. An apparatus is disclosed.
Public/Granted literature
- US20160197115A1 Methods and Apparatus for Glass Removal in CMOS Image Sensors Public/Granted day:2016-07-07
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