Invention Grant
- Patent Title: Stacked strained and strain-relaxed hexagonal nanowires
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Application No.: US15249550Application Date: 2016-08-29
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Publication No.: US09859367B2Publication Date: 2018-01-02
- Inventor: Takashi Ando , Pouya Hashemi , John A. Ott , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/06 ; H01L21/306 ; H01L29/16 ; H01L29/04 ; H01L21/02 ; H01L21/308 ; H01L21/8238 ; H01L21/8234 ; H01L21/8256 ; H01L27/092 ; H01L27/088 ; H01L29/78

Abstract:
A method for forming nanowires includes forming a plurality of epitaxial layers on a substrate, the layers including alternating material layers with high and low Ge concentration and patterning the plurality of layers to form fins. The fins are etched to form recesses in low Ge concentration layers to form pillars between high Ge concentration layers. The pillars are converted to dielectric pillars. A conformal material is formed in the recesses and on the dielectric pillars. The high Ge concentration layers are condensed to form hexagonal Ge wires with (111) facets. The (111) facets are exposed to form nanowires.
Public/Granted literature
- US20170117360A1 STACKED STRAINED AND STRAIN-RELAXED HEXAGONAL NANOWIRES Public/Granted day:2017-04-27
Information query
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