Invention Grant
- Patent Title: X-ray transmission inspection apparatus
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Application No.: US14674133Application Date: 2015-03-31
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Publication No.: US09863896B2Publication Date: 2018-01-09
- Inventor: Yoshiki Matoba
- Applicant: Hitachi High-Tech Science Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Science Corporation
- Current Assignee: Hitachi High-Tech Science Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Banner & Witcoff, Ltd.
- Priority: JP2014-072912 20140331
- Main IPC: G01B15/06
- IPC: G01B15/06 ; G01N23/083 ; G01N23/16 ; G01N23/04

Abstract:
An X-ray transmission inspection apparatus includes: an X-ray source configured to irradiate a sample with an X-ray; a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor; a shield member configured to be arranged to face a detection surface of the detector and to block a part of X-rays to partially form a shield area from the X-rays on the detection surface; and a shield moving mechanism configured to move the shield member relative to the detector to enable change of a position of the shield area.
Public/Granted literature
- US20150276626A1 X-Ray Transmission Inspection Apparatus Public/Granted day:2015-10-01
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