- 专利标题： Ultraviolet photodetectors and methods of making ultraviolet photodetectors
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申请号： US15217952申请日： 2016-07-22
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公开(公告)号： US09865766B2公开(公告)日： 2018-01-09
- 发明人: Rhonda R. Willigan , Jose L. Santana , Marcin Piech , Joseph V. Mantese
- 申请人： Carrier Corporation
- 申请人地址： US CT Farmington
- 专利权人： Carrier Corporation
- 当前专利权人： Carrier Corporation
- 当前专利权人地址： US CT Farmington
- 代理机构： Locke Lord LLP
- 代理商 Scott D. Wofsy; Christopher J. Cillié
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; C01G9/00 ; C09D1/00 ; C09D5/24 ; C09D5/32 ; C23C18/12 ; G01J1/42
摘要：
A method of making an ultraviolet sensor includes applying a metal-containing solution to a substrate using a spin coating technique to form a metal-containing coat. The metal-containing coat is baked and pyrolyzed to form a metal-containing oxide film on the substrate. The metal-containing oxide film has a cubic crystalline structure suitable for ultraviolet photodetectors in flame detection applications.
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