Invention Grant
- Patent Title: Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
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Application No.: US15385441Application Date: 2016-12-20
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Publication No.: US09875923B2Publication Date: 2018-01-23
- Inventor: Wendell Boyd, Jr. , Vijay D. Parkhe , Matthew James Busche , Konstantin Makhratchev , Masanori Ono , Senh Thach
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67
Abstract:
A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force.
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