Invention Grant
- Patent Title: Reduced capacity carrier and method of use
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Application No.: US14541934Application Date: 2014-11-14
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Publication No.: US09881825B2Publication Date: 2018-01-30
- Inventor: Ulysses Gilchrist , Michael L. Bufano , William Fosnight , Christopher Hofmeister , Gerarld M. Friedman
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673
Abstract:
A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
Public/Granted literature
- US20150155192A1 REDUCED CAPACITY CARRIER AND METHOD OF USE Public/Granted day:2015-06-04
Information query
IPC分类:
