Invention Grant
- Patent Title: Apparatuses and methods for forming die stacks
-
Application No.: US15490660Application Date: 2017-04-18
-
Publication No.: US09881910B2Publication Date: 2018-01-30
- Inventor: Michel Koopmans
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dorsey & Whitney LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/78 ; H01L25/00 ; H01L25/18 ; H01L21/683 ; H01L23/00

Abstract:
Apparatuses and methods for forming die stacks are disclosed herein. An example method includes dispensing a temporary adhesive onto a substrate, placing a base die onto the temporary adhesive, curing the temporary adhesive, forming a die stack that includes the base die, activating a release layer disposed on the substrate, wherein the release layer is between the substrate and the temporary adhesive, removing the die stack from the substrate, and removing the temporary adhesive from the die stack.
Public/Granted literature
- US20170221873A1 APPARATUSES AND METHODS FOR FORMING DIE STACKS Public/Granted day:2017-08-03
Information query
IPC分类: